A systematic MEMS sensor calibration framework
نویسندگان
چکیده
منابع مشابه
A systematic MEMS sensor calibration framework
In this paper we present a systematic method to determine sets of close to optimal sensor calibration points for a polynomial approximation. For each set of calibration points a polynomial is used to fit the nonlinear sensor response to the calibration reference. The polynomial parameters are calculated using ordinary least square fit. To determine the quality of each calibration, reference sen...
متن کاملSimulation to help calibration of a MEMS sensor network
The Smart Surface1project aims at designing an integrated micro-manipulator based on an array of micromodules connected with a 2D array topology network. Each micromodule comprises a sensor, an actuator and a processing unit. One of the aims of the processing unit is to differentiate the shape of the part that is put on top of the Smart Surface. From a set of shapes this differentiation is done...
متن کاملNew Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملA Framework to Calibrate a MEMS Sensor Network
The Smart Surface project aims at designing an integrated micro-manipulator based on an array of micromodules connected with a 2D array topology network. Each micromodule comprises a sensor, an actuator and a processing unit. One of the aims of the processing unit is to differentiate the shape of the part that is put on top of the Smart Surface. From a set of shapes this differentiation is done...
متن کاملModeling of capacitance and sensitivity of a MEMS pressure sensor
In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM). It can b...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Sensors and Sensor Systems
سال: 2015
ISSN: 2194-878X
DOI: 10.5194/jsss-4-97-2015